| Title: | Design and fabrication of MEMS low power heating membrane |
| Authors: | Svatoš, Vojtěch Márik, Marian Pekárek, Jan Slavík, Jan Chomoucká, Jana Hubálek, Jaromír |
| Citation: | Electroscope. 2012, č. 6, EDS 2012. |
| Issue Date: | 2012 |
| Publisher: | Západočeská univerzita v Plzni, Fakulta elektrotechnická |
| Document type: | konferenční příspěvek conferenceObject |
| URI: | http://147.228.94.30/images/PDF/Rocnik2012/Cislo6_2012/r6c6c8.pdf http://hdl.handle.net/11025/1049 |
| ISSN: | 1802-4564 |
| Keywords: | nízkospotřebové tepelné membrány;výrobní proces |
| Keywords in different language: | manufacturing process;low power heating membrane |
| Abstract in different language: | The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane using different fabrication process. Only wet etching process is used. Mainly two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1×1 mm, to ensure a suitable fabrication technology and the applicable design of the micro hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 °C. |
| Rights: | © 2012 Electroscope. All rights reserved. |
| Appears in Collections: | Číslo 6 - EDS 2012 (2012) Číslo 6 - EDS 2012 (2012) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| r6c6c8.pdf | 444,3 kB | Adobe PDF | View/Open |
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