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dc.contributor.authorŠašek, Martin
dc.contributor.authorZeman, Petr
dc.contributor.authorMusil, Jindřich
dc.date.accessioned2013-03-06T11:15:30Z
dc.date.available2013-03-06T11:15:30Z
dc.date.issued2007
dc.identifier.citationXXVIII International conference on phenomena in ionized gases: July 15-20, 2007, Prague, Czech Republic: proceedings. Praha: Institute of Plasma Physics AS CR, 2007, p. 711-712.en
dc.identifier.isbn978-80-87026-01-4
dc.identifier.urihttp://icpig2007.ipp.cas.cz/files/download/cd-cko/ICPIG2007/pdf/2P13-24.pdf
dc.identifier.urihttp://hdl.handle.net/11025/1438
dc.description.abstractThe article deals with oxidation of Cu films during post-deposition thermal annealing in flowing air. Cu films were sputtered from a pure Cu target in Ar using dc unbalanced magnetron. The copper oxide films formed during post-deposition thermal annealing were compared with CuOx films sputtered from Cu target in the mixture of Ar and O2. The oxidation behavior of the films was characterized by high-temperature thermogravimetry and X-ray diffraction (XRD). Thermal annealing was carried out in a wide range of temperatures from 300 to 1300°C. It was found that the CuO oxide decomposes into Cu2O+O at ~1040° C.en
dc.format3 s.
dc.format.mimetypeapplication/pdf
dc.language.isoenen
dc.publisherInstitute of Plasma Physics AS CRen
dc.relation.ispartofseriesXXVIII International conference on phenomena in ionized gases: July 15-20, 2007, Prague, Czech Republic: proceedingsen
dc.rights© Jindřich Musil, Martin Šašek, Petr Zemancs
dc.subjecttenké vrstvycs
dc.subjectmagnetronové naprašovánícs
dc.subjecttermogravimetriecs
dc.subjectměďcs
dc.subjectoxidacecs
dc.titleOxidation of sputtered Cu films during thermal annealing in flowing airen
dc.typekonferenční příspěvekcs
dc.typeconferenceObjecten
dc.rights.accessopenAccessen
dc.type.versionpublishedVersionen
dc.subject.translatedthin filmsen
dc.subject.translatedmagnetron sputteringen
dc.subject.translatedthermogravimetryen
dc.subject.translatedcopperen
dc.subject.translatedoxidationen
dc.type.statusPeer-revieweden
Appears in Collections:Konferenční příspěvky / Conference Papers (KFY)

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