Title: Optical pressure sensors in LTCC technology
Authors: Somer, Jakub
Urban, František
Urban, František
Szendiuch, Ivan
Citation: Electroscope. 2016, č. 1.
Issue Date: 2016
Publisher: Západočeská univerzita v Plzni, Fakulta elektrotechnická
Document type: článek
ISSN: 1802-4564
Keywords: optické snímače tlaku;Fabry-Parotův rezonátor;braggovská mřížka;LTCC keramická struktura
Keywords in different language: optical pressure sensors;Fabry-Parot resonator;fiber bragg grating;LTCC ceramic structure
Abstract in different language: This paper deals with the design, manufacturing and measurement of optical pressure sensors developed in Low Temperature Co-fired Ceramic technology. Tw o types of the optical measurement methods were used for the pressure sensing. The first method is based on the distance measurement using Fabry Perot resonator. The second type of pressure transducer is based on the change of the light spectrum reflected from the Fiber Bragg Grating integrated in the sensor. LTCC ceramic structure with membrane was used for the forming of a pressure transducer. Both of the sensor types were designed to measure pressure in range of ± 0,5 bar difference atmospheric pressure.
Rights: Copyright © 2015 Electroscope. All Rights Reserved.
Appears in Collections:Číslo 1 (2016)
Číslo 1 (2016)

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Please use this identifier to cite or link to this item: http://hdl.handle.net/11025/17668

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