Title: | Redesign of the supply electronics of the temperature gauge in a HF CVD reactor |
Other Titles: | Rekonštrukcia napájacích obvodov merača teploty v HF CVD reaktore |
Authors: | Kadlečíková, Magdaléna Breza, Juraj Klotton, G. Kolmačka, Michal Vančo, Ľubomír |
Citation: | Electroscope. 2016, č. 1. |
Issue Date: | 2016 |
Publisher: | Západočeská univerzita v Plzni, Fakulta elektrotechnická |
Document type: | článek article |
URI: | http://147.228.94.30/images/PDF/Rocnik2016/Cislo1_2016/r10c1c6.pdf http://hdl.handle.net/11025/17670 |
ISSN: | 1802-4564 |
Keywords: | uhlíkové nanotrubičky;HF CVD reaktor;pulzní napájecí zdroj |
Keywords in different language: | carbon nanotubes;HF CVD reactor;pulse mode power supply |
Abstract: | HF CVD (hot filament chemical vapour deposition) reaktor je technologické zariadenie, v ktorom sa na rôznych substrátoch syntetizujú uhlíkové nanorúr ky. Reaktor pracuje na princípe pyrolýzy metánu a vodíka. Substrát je umiestnený na molybdénovom držiaku niekoľko milimetrov pod žeravenými (2200 °C) volfrámovými vláknami a jeho teplota počas syntézy je optimalizovaná cca na 600 °C. Merania a regulácie teploty rotačného držiaku v priebehu syntézy sa vykonáva teplomerom s bezdrôtovým optickým prenosom dát. Počas prevádzky zariadenia sa v yskytol závažný probl é m, a to nestabilné napájanie, čo viedlo ku kolísaniu teploty v reaktore. To je dôvod, prečo bolo navrhnuté iné riešenie za použitia impulzného napájacieho zdroja. Merací reťazec bol zjednodušený od stránením mobilných kontaktov a izolačných zosilňovačov, ktoré po prehriatí pracovali ne s p r ávne a skresľovali údaje o teplote. Výsledkom tejto práce je návrh a rekonštrukcia obvodov napájajúcich merač teploty v HF CVD reaktore. |
Abstract in different language: | HF CVD (hot filament chemical vapour deposition) reactor is a technological apparatus in which carbon nanotubes are synthesized on various substrates. The reactor operates on the principle of pyrolysis of methane and hydrogen. The substrate is placed on a molybdenum holder, several millimetres below hot (2200 °C) tungsten filaments and its temperature during synthesis is optimized to approximately 600 °C. Measurement and control of the temperature of the rotating holder during synthesis are carried out by a temperatur e gauge with wireless optical data transfer. During operation of the facility a severe drawback was encountered, namely instable supplying resulting in temperature fluctuations in the reactor. This is why another solution has been designed utilizing a swit ched mode power supply. The measurement string has been simplified by removing mobile contacts and isolation amplifiers that behaved incorrectly – when they became overheated – and distorted the data on temperature. The result of the present work is the de sign and reconstruction of the circuitry supplying the temperature meter in the HF CVD reactor. |
Rights: | Copyright © 2015 Electroscope. All Rights Reserved. |
Appears in Collections: | Číslo 1 (2016) Číslo 1 (2016) |
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File | Description | Size | Format | |
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r10c1c6.pdf | Plný text | 453,89 kB | Adobe PDF | View/Open |
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http://hdl.handle.net/11025/17670
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