Title: Numerical Approach to the Problem of Digital DLTS Measurements Signal analysis
Authors: Kósa, Arpád
Rybár, Jakub
Stuchlíková, Ľubica
Citation: Electroscope. 2013, č. 5, EEICT + EDS.
Issue Date: 18-Nov-2013
Publisher: Západočeská univerzita v Plzni, Fakulta elektrotechnická
Document type: článek
article
URI: http://147.228.94.30/images/PDF/Rocnik2013/Cislo5_2013/r7c5c10.pdf
http://hdl.handle.net/11025/6624
ISSN: 1802-4564
Keywords: numerické modelování;tranzientní spektroskopie hlubokých hladin;elektrotechnická měření
Keywords in different language: numerical modelling;deep level transient spectroscopy;electrical measurements
Abstract in different language: This paper presents a novel approach in the investigation of the parameters of deep energy levels in digital DLTS (Deep Level Transient Spectroscopy) measurements. A DLTS spectra fitting algorithm and by this the calculation of the activation energy capture cross section and the trap concentration of deep energy levels is proposed. As a final result the match between fitted and evaluated parameters are presented. The fitted curves are used as representatives for a peak in the DLTS spectra. The measured DLTS signals were used for the results comparison of the numerical fitting approach and the standard DLTS direct evaluation method.
Rights: © 2013 Electroscope. All rights reserved.
Appears in Collections:Číslo 5 (2013)
Číslo 5 (2013)

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