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2007
Time-resolved Langmuir probe diagnostics of high-power pulsed dc magnetron discharges during deposition of copper films
Pajdarová, Andrea Dagmar
;
Vlček, Jaroslav
;
Musil, Jindřich
;
Kudláček, Pavel
;
Lukáš, Jan
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Kudláček, Pavel
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Lukáš, Jan
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Musil, Jindřich
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Pajdarová, Andrea Dagmar
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diagnostics
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diagnostika
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high-power pulsed magnetron
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Langmuir probe
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