Full metadata record
DC poleHodnotaJazyk
dc.contributor.authorŠotová, Petra
dc.contributor.authorNovák, Petr
dc.contributor.authorMedlín, Rostislav
dc.contributor.editorKučerová, Ludmila
dc.contributor.editorJirková, Hana
dc.contributor.editorJeníček, Štěpán
dc.date.accessioned2019-10-08T12:52:18Z-
dc.date.available2019-10-08T12:52:18Z-
dc.date.issued2019
dc.identifier.citationJIRKOVÁ, Hana ed.; JENÍČEK, Štepán ed. Proceedings PING 2019: modern trends in material engineering: 10.-13.09.2019, Pilsen. 1. vyd. Plzeň: University of West Bohemia, 2019, s. 86. ISBN 978-80-261-0879-5.en
dc.identifier.isbn978-80-261-0879-5
dc.identifier.urihttp://hdl.handle.net/11025/35258
dc.description.sponsorshipPING 2019 is organized with the support of funds for specific university research project SVK1-2019-002.en
dc.format1 s.cs
dc.format.mimetypeapplication/PDF
dc.language.isoenen
dc.publisherUniversity of West Bohemiaen
dc.rights© University of West Bohemiaen
dc.subjecttenká vrstvacs
dc.subjectAZOcs
dc.subjectmikrostrukturacs
dc.subjectSEMcs
dc.subjectTEMcs
dc.titleTEM and SEM investigation of AZO thin film microstructureen
dc.typekonferenční příspěvekcs
dc.typeconferenceObjecten
dc.rights.accessopenAccessen
dc.type.versionpublishedVersionen
dc.description.abstract-translatedThe aim of this work is describing of structure of sputtered transparent conductive aluminium-doped zinc oxide (AZO) thin films. The main attention was focused on their lateral size and orientation of the grains. The structual properties of the samples were studied by scanning electron microscope (SEM) and localy also by transmission electron microscope (TEM). The SEM analysis was used for investigation of surface morphology. Digital Micrograph and NIS-Elements were used to define the grain boundaries, which strongly affects the electrical properties. The TEM analysis of crosssection reveal that the sputtered films have a columnar structure whose lateral size increases with distance from the substrate. There were also calculated the interplanar spacing for each grain in HR-TEM images. In this work there were also the angles between the grains and substrate measured, so based on data we can estimate dependancy on the size of the angle. The data suggest that planes with a low angle of inclination from the substrate grow to the surface and outgrow the planes with a high angle of inclination. The low-oxygen AZO film was studied for the quantity of dislocations, according to the choosen HR-TEM image the dislocation density was about 10^16 nm^(-2). These data will be furtherly exploited in future research.en
dc.subject.translatedthin filmen
dc.subject.translatedAZOen
dc.subject.translatedmicrostructureen
dc.subject.translatedSEMen
dc.subject.translatedTEMen
dc.type.statusPeer-revieweden
Vyskytuje se v kolekcích:Proceedings PING 2019: modern trends in material engineering
Konferenční příspěvky / Conference Papers (CTM)
Proceedings PING 2019: modern trends in material engineering

Soubory připojené k záznamu:
Soubor Popis VelikostFormát 
Sotova.pdfPlný text180,33 kBAdobe PDFZobrazit/otevřít
Zobrazit minimální záznam Zobrazit statistiky


Použijte tento identifikátor k citaci nebo jako odkaz na tento záznam: http://hdl.handle.net/11025/35258

Všechny záznamy v DSpace jsou chráněny autorskými právy, všechna práva vyhrazena.

hledání
navigace
  1. DSpace at University of West Bohemia
  2. Publikace ZČU / UWB Publications
  3. Sborníky ZČU / UWB Proceedings
  4. Proceedings PING: modern trends in material engineering
  5. Proceedings PING 2019: modern trends in material engineering